Full Content is available to subscribers

Subscribe/Learn More  >

Conformal Growth of Textured Barium Titanate Films on Patterned Silicon Wafer

[+] Author Affiliations
Zhi Zhou, Brendan A. Patterson, Christopher C. Bowland

University of Florida, Gainesville, FL

Mohammad H. Malakooti, Henry A. Sodano

University of Michigan, Ann Arbor, MI

Paper No. SMASIS2016-9073, pp. V001T01A002; 5 pages
  • ASME 2016 Conference on Smart Materials, Adaptive Structures and Intelligent Systems
  • Volume 1: Multifunctional Materials; Mechanics and Behavior of Active Materials; Integrated System Design and Implementation; Structural Health Monitoring
  • Stowe, Vermont, USA, September 28–30, 2016
  • Conference Sponsors: Aerospace Division
  • ISBN: 978-0-7918-5048-0
  • Copyright © 2016 by ASME


This work presents a fabrication process for the conformal growth of vertically aligned BaTiO3 films on 3-dimensionally patterned silicon waters. The conformal growth is performed through a two-step hydrothermal reaction that enables the direct growth of piezoelectric films on nonplanar architectures while utilizing relatively low synthesis temperatures. Scanning electron microscopy (SEM) is used to show the controllable conversion of TiO2 nanowires to BaTiO3 films and x-ray diffraction (XRD) is used to validate the crystal structures. Tested by a refined piezoresponse force microscopy (PFM) method, the conformal films exhibited a piezoelectric coupling coefficient as high as 100 pm/V. With superior piezoelectric properties and the capability to grow on design specific surfaces, the BaTiO3 conformal films demonstrate high potential for sensors, random access memory, and other micro-electromechanical systems.

Copyright © 2016 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In