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Voltage Response of MEMS Resonators Under Simultaneous Resonances

[+] Author Affiliations
Dumitru I. Caruntu, Christian Reyes

University of Texas Pan American, Edinburg, TX

Paper No. IMECE2014-38239, pp. V04BT04A076; 5 pages
doi:10.1115/IMECE2014-38239
From:
  • ASME 2014 International Mechanical Engineering Congress and Exposition
  • Volume 4B: Dynamics, Vibration, and Control
  • Montreal, Quebec, Canada, November 14–20, 2014
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-4648-3
  • Copyright © 2014 by ASME

abstract

This paper deals with MEMS resonator sensors under double electrostatic actuation. The system consists of a MEMS cantilever between two parallel fixed plates. The frequencies of actuation are AC near natural frequency, and AC half natural frequency. The voltage response of the structure is investigated, and parameter influences reported.

Copyright © 2014 by ASME

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