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ROM of Primary Resonance of Electrostatically Actuated MEMS/NEMS Plates

[+] Author Affiliations
Dumitru I. Caruntu, Reynaldo Oyervides

University of Texas Pan American, Edinburg, TX

Paper No. IMECE2014-38294, pp. V04BT04A029; 6 pages
  • ASME 2014 International Mechanical Engineering Congress and Exposition
  • Volume 4B: Dynamics, Vibration, and Control
  • Montreal, Quebec, Canada, November 14–20, 2014
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-4648-3
  • Copyright © 2014 by ASME


This paper utilizes Reduced Order Model (ROM) method to investigate the voltage-amplitude response of electrostatically actuated M/NEMS clamped circular plates. Soft AC voltage at frequency near half natural frequency of the plate is used. This results in primary resonance of the system. The effects of nonlinearities of the system including pull-in instability on the voltage-amplitude response are investigated. Namely, the effects of detuning frequency, damping, Casimir force, and van der Waals force on the voltage response of clamped circular plates are reported. Casimir and van der Waals forces are found to have significant effects on the response of clamped circular plates and must be considered to accurately model and predict the behavior of the system.

Copyright © 2014 by ASME



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