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Failure and Sensitivity Analysis of MEMS Based Piezo-Resistive Fingerprint Sensor

[+] Author Affiliations
Adarsh Venkataraman Ganesan, Sundaram Swaminathan

BITS Pilani, Dubai Campus, Dubai, UAE

Paper No. IMECE2013-66763, pp. V009T10A059; 6 pages
  • ASME 2013 International Mechanical Engineering Congress and Exposition
  • Volume 9: Mechanics of Solids, Structures and Fluids
  • San Diego, California, USA, November 15–21, 2013
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-5638-3
  • Copyright © 2013 by ASME


Micro-electromechanical system (MEMS) is considered as the most promising technology for the development of sensors. MEMS based fingerprint sensors are used in modern day biometrics. They are generally realized using piezo resistive sensing technology in lieu of other technologies because of easy and low cost micro fabrication processes involved. But, such sensors can fail due to a number of stresses developed as it is pressed. In this paper, the first investigation is pertaining to the failure of MEMS based piezoresitive fingerprint sensors. The results indicate the sensors’ ability to withstand the maximum finger pressure. In the second investigation, the sensitivity analysis is performed using open source software, Quite Universal Circuit Simulator (QUCS) and the results are also compared with that obtained from solid mechanical simulation using COMSOL Multiphysics. The final investigation is to evaluate electrical performance of sensors connected in different configurations in circuits.

Copyright © 2013 by ASME



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