Full Content is available to subscribers

Subscribe/Learn More  >

A PZT Micropump With Planar Passive Valves and its Flow Measurements

[+] Author Affiliations
Chia-Jui Hsu, Horn-Jiunn Sheen

National Taiwan University, Taipei, Taiwan

Paper No. FEDSM2009-78250, pp. 457-462; 6 pages
  • ASME 2009 Fluids Engineering Division Summer Meeting
  • Volume 2: Fora
  • Vail, Colorado, USA, August 2–6, 2009
  • Conference Sponsors: Fluids Engineering Division
  • ISBN: 978-0-7918-4373-4 | eISBN: 978-0-7918-3855-6
  • Copyright © 2009 by ASME


In this paper, a simply-designed reciprocating-type micropump is presented. We also report the coupling effects between the valve motion and the flow behaviors, which were studied using a micro-PIV technique. The fluids were easily driven by a PZT plate and net flow was directed toward the outlet after rectification by two planar passive valves. The results revealed that good pumping performance was obtained even at a low excitation voltage of 10V. The optimum flow rate was measured at a frequency of 0.8kHz and the maximum flow rate was 275μl/min at 30V. The micropump was uniquely characterized by the existence of a linear relationship between the flow rate and the driving frequency, which enabled this micropump to be easily operated and controlled. The experimental results showed that the micropump was reliable in terms of the high linearity and repeatability, which is very favorable for portable microfluidic systems. The micro-PIV measurements of the transient motions of the valve and the flow behaviors clearly revealed that the valve efficiency depended on the mass inertia of the moving part, excitation frequency, and voltage. The present results are useful for the optimum design of this planar passive valve to improve the pumping efficiency.

Copyright © 2009 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In