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Heat Transfer and Film Dynamic in Shear-Driven Liquid Film Cooling System of Microelectronic Equipment

[+] Author Affiliations
O. A. Kabov, J. C. Legros

Université Libre de Bruxelles, Brussels, Belgium

V. V. Kuznetsov

Lavrentjev Institute of Hydrodynamics, Novosibirsk, Russia

Paper No. ICMM2004-2399, pp. 687-694; 8 pages
  • ASME 2004 2nd International Conference on Microchannels and Minichannels
  • ASME 2nd International Conference on Microchannels and Minichannels
  • Rochester, New York, USA, June 17–19, 2004
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4164-2
  • Copyright © 2004 by ASME


The conjugated two-dimensional model, based on long-wave theory, of a steady laminar flow of liquid film and co-current gas flow in plane channel with the height varied from 150 to 500 μm is performed. A chip with the several millimeters length is located on the bottom wall of channel. The linearised approximation of the problem is obtained analytically. Numerical calculations are executed for liquid FC-72 and Nitrogen gas flow. In contrast to a case of a large channel, there is essential an influence of liquid film deformations on pressure and velocity in a gas phase.

Copyright © 2004 by ASME



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