0

Full Content is available to subscribers

Subscribe/Learn More  >

Torsional Sensitivity and Resonant Frequency of an AFM With Parallel Sidewall Probes

[+] Author Affiliations
M. T. Ahmadian, M. H. Kahrobaiyan, P. Haghighi, A. Yousefi

Sharif University of Technology, Tehran, Iran

Paper No. DETC2010-28632, pp. 987-996; 10 pages
doi:10.1115/DETC2010-28632
From:
  • ASME 2010 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 5: 22nd International Conference on Design Theory and Methodology; Special Conference on Mechanical Vibration and Noise
  • Montreal, Quebec, Canada, August 15–18, 2010
  • Conference Sponsors: Design Engineering Division and Computers in Engineering Division
  • ISBN: 978-0-7918-4413-7 | eISBN: 978-0-7918-3881-5
  • Copyright © 2010 by ASME

abstract

The resonant frequencies and torsional sensitivities of an atomic force microscope (AFM) assembled cantilever probe which comprises a horizontal cantilever, two vertical extensions and two tips located at their free ends are studied. This probe makes the AFM capable of measuring, for instance, the outer/inner diameter, roundness and roughness of microstructures like micro-holes and micro nozzles which leads to a time-saving swift scanning process. In this work, the effects of the sample surface contact stiffness and the geometrical parameters such as the ratio of the vertical extension length to the horizontal cantilever length and the distance of the first vertical extension from the clamped end of the horizontal cantilever on torsional resonant frequencies and sensitivities are assessed. These geometrical effects are illustrated in some figures. The results show that the low-order vibration modes are more sensitive for low values of the contact stiffness but this situation is not valid for high values.

Copyright © 2010 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In