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Response Near Twice the Natural Frequency of Electrostatically Actuated Microresonators

[+] Author Affiliations
Martin Knecht, Dumitru I. Caruntu

University of Texas Pan American, Edinburg, TX

Paper No. DETC2010-28614, pp. 893-899; 7 pages
  • ASME 2010 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 5: 22nd International Conference on Design Theory and Methodology; Special Conference on Mechanical Vibration and Noise
  • Montreal, Quebec, Canada, August 15–18, 2010
  • Conference Sponsors: Design Engineering Division and Computers in Engineering Division
  • ISBN: 978-0-7918-4413-7 | eISBN: 978-0-7918-3881-5
  • Copyright © 2010 by ASME


This paper deals with electrostatically actuated micro resonators response near twice natural frequency. Both the electrostatic force (including fringe effect) and the Casimir force are included in the model. They introduce parametric nonlinear terms in the system. The partial-differential equation of motion of the system is solved by using the method of multiple scales. A direct approach of the problem is then used. Two approximation problems resulting from the direct approach are solved. The phase-amplitude relationship is obtained. Numerical results for uniform electrostatically actuated micro resonator sensors are provided.

Copyright © 2010 by ASME



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