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Mechanical Properties of CrN Films Deposited by Magnetron Sputtering Method

[+] Author Affiliations
A. H. Jayatissa, D. Wagner, S. Sorin

University of Toledo

N. X. Randall

CSM Instruments

Paper No. IMECE2006-15208, pp. 135-138; 4 pages
  • ASME 2006 International Mechanical Engineering Congress and Exposition
  • Tribology
  • Chicago, Illinois, USA, November 5 – 10, 2006
  • Conference Sponsors: Tribology Division
  • ISBN: 0-7918-4782-9 | eISBN: 0-7918-3790-4
  • Copyright © 2006 by ASME


The mechanical properties of CrN films coated by radio frequency (rf) magnetron sputtering method were investigated. CrN films were coated on stainless steel, silicon wafer and glass substrates using sputtering of a Cr target in nitrogen ambient. The films were coated by varying the deposition temperature, nitrogen partial pressure and rf power density. The films coated were characterized by nanoindentation method, microhardness, optical, and corrosion tests. In order to use CrN as mechanical coating material, the surface roughness, hardness and adhesion properties have to be determined. The film properties were measured using atomic force microscopy and nanoindentation method and analyzed as a function of deposition conditions. It was found that these properties can be varied by changing the deposition conditions.

Copyright © 2006 by ASME



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