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Comparison of Methods for Simulating Gas Forces on Moving Microbeams

[+] Author Affiliations
J. R. Torczynski, M. A. Gallis, E. S. Piekos

Sandia National Laboratories, Albuquerque, NM

Paper No. IMECE2002-33788, pp. 565-570; 6 pages
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Electronic and Photonic Packaging, Electrical Systems Design and Photonics, and Nanotechnology
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 0-7918-3648-7 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME


The force produced by the surrounding gas on a moving cantilevered microbeam is analyzed using the Reynolds equation, the Navier-Stokes equations, and the Direct Simulation Monte Carlo (DSMC) method (i.e., molecular gas dynamics). It is found that the Reynolds equation underpredicts the damping coefficient compared to the Navier-Stokes equations, particularly when the gap width becomes comparable to the beam half-width. The accuracy of the Reynolds equation can be significantly improved for these conditions by modifying the pressure boundary condition applied at the edge of the beam (this modified boundary condition reverts to the original boundary condition as the gap width becomes much smaller than the beam half-width). Since continuum methods with slip boundary conditions are of uncertain accuracy for large slip velocities, DSMC simulations are performed to compare to Reynolds-equation results and Navier-Stokes simulations. The damping coefficients from DSMC simulations are generally somewhat lower than the corresponding Navier-Stokes values.

Copyright © 2002 by ASME
Topics: Force , Microbeams



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