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Buckling Induced Nonlinear Phenomenon in a Micro-Electromechanical Resonator

[+] Author Affiliations
He Li, B. Balachandran

University of Maryland, College Park, MD

Paper No. IMECE2002-39010, pp. 185-189; 5 pages
  • ASME 2002 International Mechanical Engineering Congress and Exposition
  • Adaptive Structures and Materials Systems
  • New Orleans, Louisiana, USA, November 17–22, 2002
  • Conference Sponsors: Aerospace Division
  • ISBN: 0-7918-3625-8 | eISBN: 0-7918-1691-5, 0-7918-1692-3, 0-7918-1693-1
  • Copyright © 2002 by ASME


Oscillations of micro-electromechanical resonators constructed from clamped-clamped beam structures are studied in this effort. Piezoelectric actuation is used to excite these structures on the input side and piezoelectric sensing is carried out on the output side. Although axial loads in clamped-clamped beam based on micro-electromechanical systems (MEMS) have been considered before, the relevance of buckling to this problem has not studied before in such “small” scale systems. In this work, possibilities for buckling are examined, and it is shown that for resonance excitations, consideration of buckling may help explain associated experimentally observed spatial patterns as a nonlinear phenomenon.

Copyright © 2002 by ASME
Topics: Buckling



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