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Experimental Study and Computer Simulation of Heat Transfer for High Flux Cooling Applications With Microchannels in Micro-Electro-Mechanical Systems (MEMS)

[+] Author Affiliations
Shuzhi Peng, Tilak T. Chandratilleke

Curtin University of Technology, Perth, WA, Australia

Paper No. FEDSM2002-31299, pp. 1095-1100; 6 pages
  • ASME 2002 Joint U.S.-European Fluids Engineering Division Conference
  • Volume 2: Symposia and General Papers, Parts A and B
  • Montreal, Quebec, Canada, July 14–18, 2002
  • Conference Sponsors: Fluids Engineering Division
  • ISBN: 0-7918-3616-9 | eISBN: 0-7918-3600-2
  • Copyright © 2002 by ASME


This paper aims to apply experiment and computer simulation to investigate heat transfer characteristics of different fluids through microchannels with different geometries. An experimental apparatus with multi-functions, low uncertainties, high precision and temperature control was constructed. The experimental results are compared with the results of computer simulations and theoretical predictions from the conventional laminar flow theory. The flow rate, temperature and pressure drop were measured at steady states to analyse flow characteristics. It was concluded that the effect of allowance for machining of microchannels on heat transfer characteristics could be neglected under lower flow rate. The fluid mass flow rate, the inlet temperature of fluid, and the geometric parameters, particularly the hydraulic diameter and aspect ratio H/Wm in rectangular microchannels were found to have a significant influence on fluid flow and heat transfer characteristics.

Copyright © 2002 by ASME



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