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Fabrication of Miniature Silicon Wafer Fuel Cells Using Micro Fabrication Technologies

[+] Author Affiliations
Jingrong Yu, Ping Cheng, Zhiqi Ma

Hong Kong University of Science and Technology, Kowloon, Hong Kong

Baolian Yi

Chinese Academy of Sciences, Dalian, P.R. China

Paper No. FUELCELL2003-1732, pp. 287-291; 5 pages
  • ASME 2003 1st International Conference on Fuel Cell Science, Engineering and Technology
  • 1st International Fuel Cell Science, Engineering and Technology Conference
  • Rochester, New York, USA, April 21–23, 2003
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 0-7918-3668-1
  • Copyright © 2003 by ASME


The fabrication of miniature silicon wafer fuel cells by micro-fabrication technologies and their performance evaluation are presented in this paper. Various thickness of Nafion membranes, such as Nafion 117, 115, and 112, were tested as electrolytes in a miniature single cell operating with dry H2 /O2 . Among these membranes, Nafion 112 (with the thinnest thickness) gave the best performance of 92.2 mW/cm2 at 250mA/cm2 . In order to enhance the output voltage of the fuel cell, a miniature twin-fuel-cell was fabricated in series using two membrane-electrode-assemblies of Nafion 112 membrane sandwiched between two silicon substrates. The novel structure of the miniature twin-fuel-cell is that the electricity interconnect from the cathode of one cell to the anode of another cell is made on the same plane. The interconnect is fabricated by sputtering a layer of gold on the top of the silicon wafer. Silicon dioxide is deposited on the silicon wafer adjacent to the gold layer to prevent short-circuiting between the twin-cells. At ambient conditions, the measured peak power densities of the miniature twin-fuel-cell operating with H2 /O2 and 1.5M methanol/O2 , are 190.4mW/cm2 and 15.4mW/cm2 , respectively.

Copyright © 2003 by ASME



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