0

Full Content is available to subscribers

Subscribe/Learn More  >

Modeling and Testing of a Minimally Powered SOI-DRIE MEMS Pressure Sensor for Discrete Blast Detection

[+] Author Affiliations
Vicky Taffoti Fondjo, Franklin Fondjo Fotou

Langston University, Langston, OK

Oliver M. Barham, Muhammad Khan, Daniel L. Jean

NSWC, IHEODTD, Indian Head, MD

Scott G. Rauscher

University of Maryland, College Park, MD

Paper No. DETC2018-85898, pp. V004T08A027; 9 pages
doi:10.1115/DETC2018-85898
From:
  • ASME 2018 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems
  • Quebec City, Quebec, Canada, August 26–29, 2018
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-5179-1
  • Copyright © 2018 by ASME

abstract

MEMS diaphragms utilizing an embedded cantilever array to sense pressure were investigated in an effort to detect blast-induced loads that potentially cause mild traumatic brain injury (mTBI). Overhanging cantilever beams of varying length sequentially contacted convexly deformed diaphragms during pressure loading to enable binned binary threshold pressure sensing. Diaphragms and overhanging cantilever beam arrays photolithographically defined using double-layer SOI-DRIE processes were designed to minimize footprint and maximize sensing resolution while avoiding diaphragm fracture. Analytic models based on classical plate theory were correlated with a FEA model to guide design decisions by predicting deflection behavior of circular diaphragms under uniformly distributed pressure loads. Fabricated sensors experimentally tested under static conditions revealed good agreement with modeling, and indicated such a sensor may be well-suited for integration into a future wearable device capable of sensing potentially mTBI-causing blasts using minimal power.

Copyright © 2018 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In