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An Experimental and Theoretical Investigation of Double Resonance Activation in Electrostatic MEMS Resonators

[+] Author Affiliations
Mohammad H. Hasan

University of Nebraska at Lincoln, Lincoln, NE

Hassen M. Ouakad

King Fahd University of Petroleum and Minerals, Dhahran, Saudi Arabia

Nizar R. Jaber, Md Abdullah Al Hafiz, Mohammad Younis

King Abdullah University of Science and Technology, Thuwal, Saudi Arabia

Fadi Alsaleem

University of Nebraska at Lincoln, Omaha, NE

Paper No. DETC2018-85887, pp. V004T08A026; 7 pages
  • ASME 2018 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems
  • Quebec City, Quebec, Canada, August 26–29, 2018
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-5179-1
  • Copyright © 2018 by ASME


Electrostatic micro-electro-mechanical-system (MEMS) devices show great potential in a variety of applications such as sensing and actuation; however, they are hindered by their high input voltage requirement. Double resonance excitation, which activates the system’s mechanical and electrical resonances simultaneously, was recently demonstrated experimentally to alleviate this problem. In this work, we present a mathematical model, based on the Euler Bernoulli beam model coupled with a circuit model, to simulate double resonance in MEMS devices and to shed light more onto the previously published experimental data. We show good agreement between the theoretical simulation and experimental data when the electrical resonance frequency band is sufficiently high.

Copyright © 2018 by ASME



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