0

Full Content is available to subscribers

Subscribe/Learn More  >

Characterization of a Non-Interdigitated Comb Drive

[+] Author Affiliations
Mary Gopanchuk, Mohamed Arabi, N. Nelson-Fitzpatrick, Majed S. Al-Ghamdi, Eihab Abdel-Rahman, Mustafa Yavuz

University of Waterloo, Waterloo, ON, Canada

Paper No. DETC2018-86271, pp. V004T08A013; 5 pages
doi:10.1115/DETC2018-86271
From:
  • ASME 2018 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems
  • Quebec City, Quebec, Canada, August 26–29, 2018
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-5179-1
  • Copyright © 2018 by ASME

abstract

This paper reports on the design, fabrication, and characterization of non-interdigitated comb drive actuators in Silicon-on-Insulator (SOI) wafers, using a single mask surface microma-chining process. The response of the actuator is analyzed numerically and experimentally. The results show at the fundamental frequency; it behaves as a longitudinal comb drive actuator. At a higher frequency, it exhibits a high-quality factor which is appropriate for sensor applications.

Copyright © 2018 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In