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Characterization of a Non-Interdigitated Comb Drive

[+] Author Affiliations
Mary Gopanchuk, Mohamed Arabi, N. Nelson-Fitzpatrick, Majed S. Al-Ghamdi, Eihab Abdel-Rahman, Mustafa Yavuz

University of Waterloo, Waterloo, ON, Canada

Paper No. DETC2018-86271, pp. V004T08A013; 5 pages
  • ASME 2018 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems
  • Quebec City, Quebec, Canada, August 26–29, 2018
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-5179-1
  • Copyright © 2018 by ASME


This paper reports on the design, fabrication, and characterization of non-interdigitated comb drive actuators in Silicon-on-Insulator (SOI) wafers, using a single mask surface microma-chining process. The response of the actuator is analyzed numerically and experimentally. The results show at the fundamental frequency; it behaves as a longitudinal comb drive actuator. At a higher frequency, it exhibits a high-quality factor which is appropriate for sensor applications.

Copyright © 2018 by ASME



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