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Empirical Mode Decomposition for Dynamic AFM Microcantilevers in Air and Liquid Environment

[+] Author Affiliations
Il Kwang Kim, Jea Woong Jang, Soo Il Lee

University of Seoul, Seoul, South Korea

Paper No. DETC2018-86215, pp. V004T08A012; 8 pages
  • ASME 2018 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems
  • Quebec City, Quebec, Canada, August 26–29, 2018
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-5179-1
  • Copyright © 2018 by ASME


The modal decomposition of tapping mode atomic force microscopy microcantilevers in air and liquid environment was experimentally investigated to identify their complex responses. In experiment, the flexible microcantilevers and a flat HOPG sample were used. The responses of the microcantilevers were obtained to extract the linearized modes and orthogonal values using the methods for the proper orthogonal decomposition and the smooth orthogonal decomposition. The influence of the tapping setpoints and the hydrodynamic damping forces were investigated with the multi-mode response of microcantilevers. The results show that the first mode is dominant under normal operating conditions in tapping mode. However, at lower setpoint, the flexible microcantilever behaved uncertain modal distortion near the tip on the sample. The dynamics tapping effect and the damping between microcantilever and liquid influenced their responses.

Copyright © 2018 by ASME



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