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A Finite-Impulse-Response-Based Approach to Control Acoustic-Caused Probe-Vibration in Atomic Force Microscope Imaging

[+] Author Affiliations
Sicheng Yi

Shanghai Jiao Tong University, Shanghai, China

Qingze Zou

Rutgers University, Piscataway, NJ

Paper No. DSCC2017-5103, pp. V002T23A002; 6 pages
  • ASME 2017 Dynamic Systems and Control Conference
  • Volume 2: Mechatronics; Estimation and Identification; Uncertain Systems and Robustness; Path Planning and Motion Control; Tracking Control Systems; Multi-Agent and Networked Systems; Manufacturing; Intelligent Transportation and Vehicles; Sensors and Actuators; Diagnostics and Detection; Unmanned, Ground and Surface Robotics; Motion and Vibration Control Applications
  • Tysons, Virginia, USA, October 11–13, 2017
  • Conference Sponsors: Dynamic Systems and Control Division
  • ISBN: 978-0-7918-5828-8
  • Copyright © 2017 by ASME


In this paper, we propose a finite-impulse-response (FIR)-based feedforward control approach to mitigate the acoustic-caused probe vibration during atomic force microscope (AFM) imaging. Compensation for the extraneous probe vibration is needed to avoid the adverse effects of environmental disturbances such as acoustic noise on AFM imaging, nanomechanical characterization, and nanomanipulation. Particularly, residual noise still exists even though conventional passive noise cancellation apparatus has been employed. The proposed technique exploits a data-driven approach to capture both the noise propagation dynamics and the noise cancellation dynamics in the controller design, and is illustrated through the experimental implementation in AFM imaging application.

Copyright © 2017 by ASME



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