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A Novel Threshold Pressure Sensor Based on Nonlinear Dynamics of MEMS Arches

[+] Author Affiliations
Mohammad H. Hasan, Fadi M. Alsaleem

University of Nebraska at Lincoln, Omaha, NE

Hassen M. Ouakad

King Fahd University of Petroleum and Minerals, Dhahran, Saudi Arabia

Paper No. DETC2017-67874, pp. V009T07A055; 6 pages
  • ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 9: 13th ASME/IEEE International Conference on Mechatronic and Embedded Systems and Applications
  • Cleveland, Ohio, USA, August 6–9, 2017
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-5823-3
  • Copyright © 2017 by ASME


In this paper, we propose a new tunable pressure sensor based on the nonlinear snap-through instability of an electrically actuated shallow arch microbeam. The general concept of the sensor can be explained as follows: the shallow arch is excited to trigger dynamic snap-through instability yielding a high output amplitude, if the system operating pressure is below a threshold value. This state is interpreted as a digital logic 1. Once the varying pressure exceeds that threshold value, the arch gains its stability. Therefore, the new state would be interpreted as a digital logic 0 value. We show an example of an operation range of the proposed sensor by identifying the relationship between the excitation AC voltage and the critical cut-off pressure.

Copyright © 2017 by ASME



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