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An Electrically Actuated Microbeam-Based MEMS Device: Experimental and Theoretical Investigation

[+] Author Affiliations
Laura Ruzziconi, Stefano Lenci

Polytechnic University of Marche, Ancona, Italy

Nizar Jaber, Lakshmoji Kosuru, Mohammed L. Bellaredj, Mohammad I. Younis

King Abdullah University of Science and Technology, Thuwal, Saudi Arabia

Paper No. DETC2017-67579, pp. V006T10A043; 7 pages
  • ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 6: 13th International Conference on Multibody Systems, Nonlinear Dynamics, and Control
  • Cleveland, Ohio, USA, August 6–9, 2017
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-5820-2
  • Copyright © 2017 by ASME


The present paper deals with the dynamic behavior of a microelectromechanical systems (MEMS). The device consists of a clamped-clamped microbeam electrostatically and electrodynamically actuated. Our objective is to develop a theoretical analysis, which is able to describe and predict all the main relevant aspects of the experimental response. In the first part of the paper an extensive experimental investigation is conducted. The microbeam is perfectly straight. The first three experimental natural frequencies are identified and the nonlinear dynamics are explored at increasing values of electrodynamic excitation. Several backward and forward frequency sweeps are acquired. The nonlinear behavior is highlighted. The experimental data show the coexistence of the nonresonant and the resonant branch, which perform a bending toward higher frequencies values before undergoing jump or pull-in dynamics. This kind of bending is not particularly common in MEMS. In the second part of the paper, a theoretical single degree-of-freedom model is derived. The unknown parameters are extracted and settled via parametric identification. A single mode reduced-order model is considered, which is obtained via the Galerkin technique. To enhance the computational efficiency, the contribution of the electric force term is computed in advance and stored in a table. Extensive numerical simulations are performed at increasing values of electrodynamic excitation. They are observed to properly predict all the main nonlinear features arising in the device response. This occurs not only at low values of electrodynamic excitation, but also at higher ones.

Copyright © 2017 by ASME



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