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MEMS Coupled Resonator for Filter Application in Air

[+] Author Affiliations
Saad Ilyas, Nizar Jaber, Mohammad I. Younis

King Abdullah University of Science and Technology, Thuwal, Saudi Arabia

Paper No. DETC2017-67875, pp. V004T09A021; 5 pages
doi:10.1115/DETC2017-67875
From:
  • ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems
  • Cleveland, Ohio, USA, August 6–9, 2017
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-5816-5
  • Copyright © 2017 by ASME

abstract

We present a mechanically coupled MEMS H resonator capable of performing simultaneous amplification and filter operation in air. The device comprises of two doubly clamped polyimide microbeams joined through the middle by a coupling beam of the same size. The resonator is fabricated via a multi-layer surface micromachining process. A special fabrication process and device design is employed to enable the device’s operation in air and to achieve mechanical amplification of the output response. Moreover, mixed-frequency excitation is used to demonstrate a tunable wide band filter. The device design combined with the mixed-frequency excitation is used to demonstrate simultaneous amplification and filtering in air.

Copyright © 2017 by ASME

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