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Axially Modulated Clamped-Guided Arch Resonator for Memory and Logic Applications

[+] Author Affiliations
Md Abdullah Al Hafiz, Sherif Tella, Nouha Alcheikh, Hossein Fariborzi, Mohammad I. Younis

King Abdullah University of Science and Technology, Thuwal, Saudi Arabia

Paper No. DETC2017-68284, pp. V004T09A016; 6 pages
  • ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems
  • Cleveland, Ohio, USA, August 6–9, 2017
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-5816-5
  • Copyright © 2017 by ASME


We experimentally demonstrate memory and logic devices based on an axially modulated clamped-guided arch resonator. The device are electrostatically actuated and capacitively sensed, while the resonance frequency modulation is achieved through an axial electrostatic force from the guided side of the clamped-guided arch microbeam. We present two case studies: first, a dynamic memory based on the nonlinear frequency response of the resonator, and second, a reprogrammable two-input logic gate based on the linear frequency modulation of the resonator. These devices show energy cost per memory/logic operation in pJ, are fully compatible with CMOS fabrication processes, have the potential for on-chip system integration, and operate at room temperature.

Copyright © 2017 by ASME
Topics: Arches



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