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Practical Design of a High Frequency Phased-Array Acoustic Microscope Probe: A Preliminary Study

[+] Author Affiliations
Jeong Nyeon Kim, Richard L. Tutwiler, Judith A. Todd

Pennsylvania State University, University Park, PA

Paper No. PVP2017-65270, pp. V005T11A020; 9 pages
  • ASME 2017 Pressure Vessels and Piping Conference
  • Volume 5: High-Pressure Technology; ASME Nondestructive Evaluation, Diagnosis and Prognosis Division (NDPD); SPC Track for Senate
  • Waikoloa, Hawaii, USA, July 16–20, 2017
  • Conference Sponsors: Pressure Vessels and Piping Division
  • ISBN: 978-0-7918-5798-4
  • Copyright © 2017 by ASME


Scanning acoustic microscopy (SAM) has been a well-recognized tool for both visualization and quantitative evaluation of materials at the microscale since its invention in 1974. While there have been multiple advances in SAM over the past four decades, some issues still remain to be addressed. First, the measurement speed is limited by the mechanical movement of the acoustic lens. Second, a single element transducer acoustic lens only delivers a predetermined beam pattern for a fixed focal length and incident angle, thereby limiting control of the inspection beam. Here, we propose to develop a phased-array probe as an alternative to overcome these issues. Preliminary studies to design a practical high frequency phased-array acoustic microscope probe were explored. A linear phased-array, comprising 32 elements and operating at 5 MHz, was modeled using PZFlex, a finite-element method software. This phased-array system was characterized in terms of electrical input impedance response, pulse-echo and impulse response, surface displacement profiles, mode shapes, and beam profiles. The results are presented in this paper.

Copyright © 2017 by ASME



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