0

Full Content is available to subscribers

Subscribe/Learn More  >

Crystallinity-Induced Degradation of the Lifetime of Advanced Interconnections

[+] Author Affiliations
Takeru Kato, Ken Suzuki, Hideo Miura

Tohoku University, Sendai, Japan

Paper No. IMECE2016-67619, pp. V010T13A002; 7 pages
doi:10.1115/IMECE2016-67619
From:
  • ASME 2016 International Mechanical Engineering Congress and Exposition
  • Volume 10: Micro- and Nano-Systems Engineering and Packaging
  • Phoenix, Arizona, USA, November 11–17, 2016
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-5064-0
  • Copyright © 2016 by ASME

abstract

The electromigration (EM) resistance of interconnections manufactured by electroplating was investigated from the viewpoint of temperature and diffusion paths in the polycrystalline materials. The crystallinity of the interconnections was evaluated by image quality (IQ) value obtained from electron back-scatter diffraction analysis. The degradation process under the EM test was observed by using the IQ value. The degradation of the interconnections was dominated by the diffusion of component atoms along random grain boundaries with low crystallinity. It was also found that the electrical resistance of the interconnections varied drastically depending on the crystallinity of the material, and thus, the maximum temperature in the interconnections caused by Joule heating during the EM loading also varied drastically because of the change of the resistance. Since the diffusion constant of the component atoms is accelerated by not only the current density but also temperature, the lifetime of the interconnections under the EM loading is a strong function of the crystallinity of the interconnections. It is necessary, therefore, to evaluate and control the crystallinity of the interconnections quantitatively using IQ value to assure their long-term reliability.

Copyright © 2016 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In