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Influence of Species Transport and Inlet Condition on the MOCVD-Grown GaN Uniformity

[+] Author Affiliations
Zhi Zhang, Haisheng Fang, Jiang Zheng, Han Yan, Zhiyin Gan

Huazhong University of Science & Technology, Wuhan, China

Paper No. IMECE2016-65833, pp. V008T10A050; 6 pages
  • ASME 2016 International Mechanical Engineering Congress and Exposition
  • Volume 8: Heat Transfer and Thermal Engineering
  • Phoenix, Arizona, USA, November 11–17, 2016
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-5062-6
  • Copyright © 2016 by ASME


A three-dimensional model focusing on fluid flow, heat transfer, species transport and chemical reaction is investigated in a commercial metal-organic chemical vapor deposition (MOCVD) reactor. The key reaction pre-exponential factor is improved to yield more reasonable results matching the experiment data. The growth rate and growth uniformity are carefully investigated with the premixed and non-premixed inlets, as well as with the various temperatures, flow rates and V:III ratios. The susceptor of the reactor is divided into Zone A, Zone B and Zone C according to the heater alignment. The results reveal that the premixed inlet leads to a more uniform growth rate than the non-premixed inlet does. Temperature change of the inlet gas has a negligible influence on the growth rate and uniformity. A larger flow rate and/or lower V:III ratio result in increase of the growth rate and uniformity. However, growth uniformity of the particular zones shows different variable-dependent tendency. The conclusions can be instructive for high-efficiency and better-quality manufacture in industry production with a balance between the growth rate and the growth uniformity.

Copyright © 2016 by ASME



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