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Research on Optical-Electrostatic Driving Micro-Mirror Based on PLZT Ceramic

[+] Author Affiliations
Y. F. Liu, X. J. Wang, F. Lu, D. Sun, J. Wang

Nanjing University of Science and Technology, Nanjing, China

Paper No. IMECE2016-65319, pp. V04BT05A048; 5 pages
  • ASME 2016 International Mechanical Engineering Congress and Exposition
  • Volume 4B: Dynamics, Vibration, and Control
  • Phoenix, Arizona, USA, November 11–17, 2016
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-5055-8
  • Copyright © 2016 by ASME


The Lanthanum-doped lead zirconate titannate (PLZT) ceramic can be able to drive a micro-mirror according to its excellent advantages such as less susceptible to electromagnetic interference, non-contact optical control and other features. However, the slow response of the photo-deformation and inherent hysteresis extremely limit its wide applications, especially in the dynamic fields of high frequency. To solve above-mentioned problems, this paper proposes an optical-electrostatic driving approach to actuate a device including two parallel electrode plates and a micro-mirror. For the experiment, the SMF-28 fiber with a diameter of 8.2um was selected and the displacement and photovoltage of the PLZT ceramic when irradiated with ultraviolet light of 200mWcm−2 were measured and analyzed. The results show that the response time of the PLZT ceramic obtains 20s when the deformation displacement reaches over 8.2um. Based on the proposed hybrid optical-electrostatic driving device, the deformation displacement is demonstrated to be 9.17um by applying 300V voltage to the parallel electrode plates. Furthermore, the response time reduces to almost 1s when the photovoltage of PLZT is applied with 300V, which indicates that the proposed hybrid optical-electrostatic driving mechanism can significantly eliminate the effect of slow response of photo-deformation.

Copyright © 2016 by ASME
Topics: Ceramics , Mirrors



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