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Frequency Response of Electrostatically Actuated MEMS Resonators Under Superharmonic Resonance Using MMS

[+] Author Affiliations
Dumitru I. Caruntu, Christian Reyes

University of Texas Rio Grande Valley, Edinburg, TX

Paper No. IMECE2016-66816, pp. V04BT05A028; 7 pages
  • ASME 2016 International Mechanical Engineering Congress and Exposition
  • Volume 4B: Dynamics, Vibration, and Control
  • Phoenix, Arizona, USA, November 11–17, 2016
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-5055-8
  • Copyright © 2016 by ASME


This work investigates the voltage response of superharmonic resonance of second order of electrostatically actuated Micro-Electro-Mechanical Systems (MEMS) resonator cantilevers. The results of this work can be used for mass sensors design. The MEMS device consists of MEMS resonator cantilever over a parallel ground plate (electrode) under Alternating Current (AC) voltage. The AC voltage is of frequency near one fourth of the natural frequency of the resonator which leads to the superharmonic resonance of second order. The AC voltage produces an electrostatic force in the category of hard excitations, i.e. for small voltages the resonance is not present while for large voltages resonance occurs and bifurcation points are born. This solution is then used in the first-order problem to find the voltage-amplitude response of the structure. The influences of frequency and damping on the response are investigated. This work opens the door of using smaller AC frequencies for MEMS resonator sensors. The frequency response of the superharmonic resonance of the structure is investigated using the method of multiple scales (MMS).

Copyright © 2016 by ASME



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