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Experimental Investigation of 2:1 and 3:1 Internal Resonances in Nonlinear MEMS Arch Resonators

[+] Author Affiliations
Abdallah Ramini, Amal Hajjaj, Mohammad I. Younis

King Abdullah University of Science and Technology, Thuwal, Saudi Arabia

Paper No. DETC2016-59538, pp. V006T09A017; 6 pages
  • ASME 2016 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 6: 12th International Conference on Multibody Systems, Nonlinear Dynamics, and Control
  • Charlotte, North Carolina, USA, August 21–24, 2016
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-5018-3
  • Copyright © 2016 by ASME


We demonstrate experimentally internal resonances in MEMS resonators. The investigation is conducted on in-plane MEMS arch resonators fabricated with a highly doped silicon. The resonators are actuated electrostatically and their stiffness are tuned by electrothermal loading by passing an electrical current though the microstructures. We show that through this tuning, the ratio of the various resonance frequencies can be varied and set at certain ratios. Particularly, we adjust the resonance frequencies of two different vibrational modes to 2:1 and 3:1. Finally, we validate the internal resonances at these ratios through frequency-response curves and FFTs.

Copyright © 2016 by ASME



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