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Design of a Force Sensor Based on Flexure Beams With Piezoresistive and PVDF Elements

[+] Author Affiliations
Yuzhang Wei, Qingsong Xu

University of Macau, Taipa, China

Paper No. DETC2016-59759, pp. V05AT07A016; 7 pages
  • ASME 2016 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 5A: 40th Mechanisms and Robotics Conference
  • Charlotte, North Carolina, USA, August 21–24, 2016
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-5015-2
  • Copyright © 2016 by ASME


Majority of existing methods of measuring micro-force are limited by the sensing elements, which are fixed on the manipulator and not well decoupled from other axes. In this paper, a unique 1-D force sensor with different sensing elements is first proposed as a micro-manipulator for 1-D force sensing applications in biological cell injection. The goal is to fabricate a compliant sensor using piezoresistive and PVDF (polyvinylidene fluoride) elements for cell injection with sufficient accuracy. The designed sensor is manufactured and calibrated with a commercial GSO gram sensor. Experimental results show a good linearity between the applied force and output voltage signals, which demonstrates the feasibility of the concept design of a force sensor acting as the cell holder. The performances of the force sensor employing piezoresistive and PVDF elements are compared by conducting experimental studies.

Copyright © 2016 by ASME



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