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Experimental and Theoretical Studies of Nonlinear Resonances in a Si Microcantilever Constrained by a Polymer Attachment

[+] Author Affiliations
Keivan Asadi, Hanna Cho

Ohio State University, Columbus, OH

Snehan Peshin, Junghoon Yeom

Michigan State University, East Lansing, MI

Paper No. DETC2016-60116, pp. V004T08A009; 7 pages
  • ASME 2016 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 21st Design for Manufacturing and the Life Cycle Conference; 10th International Conference on Micro- and Nanosystems
  • Charlotte, North Carolina, USA, August 21–24, 2016
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-5014-5
  • Copyright © 2016 by ASME


In micro/nanometer scale mechanical resonators, constructive utilization of intentional nonlinearity has suggested ways to leverage beneficial nonlinear characteristics in their design for various applications. Previous studies have also shown that the geometric nonlinearity is effectively implemented and tailored through integration of nonlinear couplings to an otherwise linear microcantilever. Here, we demonstrate experimentally a nonlinear micromechanical resonator consisting of a silicon microcantilever axially constrained by a polymer attachment exhibiting a strong nonlinear hardening behavior not only in its first flexural mode but also in higher modes. A theoretical model representing the system with geometrically nonlinear stiffness and damping is analyzed by the method of multiple scales, which is favorably validated by good agreement with experimentally obtained nonlinear responses.

Copyright © 2016 by ASME
Topics: Resonance , Polymers



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