0

Full Content is available to subscribers

Subscribe/Learn More  >

Nonlinear Dynamic Models of Piezoelectric Nano-Stages

[+] Author Affiliations
S. Nima Mahmoodi

University of Alabama, Tuscaloosa, AL

Ehsan Omidi, Christian Rankl

Keysight Technologies, Inc., Santa Clara, CA

Paper No. SMASIS2016-9228, pp. V002T03A021; 6 pages
doi:10.1115/SMASIS2016-9228
From:
  • ASME 2016 Conference on Smart Materials, Adaptive Structures and Intelligent Systems
  • Volume 2: Modeling, Simulation and Control; Bio-Inspired Smart Materials and Systems; Energy Harvesting
  • Stowe, Vermont, USA, September 28–30, 2016
  • Conference Sponsors: Aerospace Division
  • ISBN: 978-0-7918-5049-7
  • Copyright © 2016 by ASME

abstract

High resolution imaging in scanning probe microscopes is conducted by rastering a sharp probe over a sample surface. The rastering is done using piezoelectric elements, converting applied voltage into mechanical motion. For example, imaging of a rectangular field of view is done by applying triangular waveforms with different frequencies to X and Y piezoelectric stage, respectively. A disadvantage of piezoelectric stages is their non-linear response to applied voltage. In addition to that, they show creep, i.e. moving even though the applied voltage is constant. This results in distortions of the acquired image. Furthermore, it can result in not precisely imaging the requested area. A common solution is to add position sensors to the piezoelectric stages and measure actual movements. By using a feedback it would be almost guaranteed that the piezoelectric stage moves as requested. The disadvantage of this approach is that it reduces the bandwidth and increases the noise. The aim of this paper is to study advanced piezoelectric stage models to better control the actual stage movement in an open-loop scan.

Copyright © 2016 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In