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Asymptotic Effective Piezoelectric Coefficient Solution of Piezoresponse Force Microscopy for a Transversely Isotropic Piezoelectric Film

[+] Author Affiliations
J. H. Wang

Northwestern Polytechnical University, Xi'an, China

C. Q. Chen

Tsinghua University, Beijing, China

Paper No. IMECE2015-51276, pp. V009T12A034; 5 pages
  • ASME 2015 International Mechanical Engineering Congress and Exposition
  • Volume 9: Mechanics of Solids, Structures and Fluids
  • Houston, Texas, USA, November 13–19, 2015
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-5752-6
  • Copyright © 2015 by ASME


Based on the coupled theory, a simple explicit solution of piezoresponse force microscopy (PFM) in determining the effective piezoelectric coefficient for an ultra-thin transversely isotropic piezoelectric film bonded to a rigid conducting substrate is obtained, using the Taylor expansion and homogeneous assumption. And it is found to be exactly the same as the well-known result for the case of piezoelectric thin film clamped between flat rigid electrodes for homogeneous external electric field. The electric charge and the distance from the image charge model are also derived and the influences of the film thickness and substrate permittivity on the effective piezoelectric coefficient are then discussed. The obtained results can be used to quantitatively interpret the PFM signals and directly detect the piezoelectric constant through PFM for an ultra-thin film or supply important information for constructing a reliable formula to describe the thickness effect.

Copyright © 2015 by ASME
Topics: Microscopy



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