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Nonlinear Harmonic Vibration Analysis of a Fully Clamped Micro-Beam

[+] Author Affiliations
Mehran Sadri, Davood Younesian

Iran University of Science and Technology, Tehran, Iran

Ebrahim Esmailzadeh

University of Ontario Institute of Technology, Oshawa, ON, Canada

Paper No. DETC2015-46862, pp. V006T10A052; 6 pages
doi:10.1115/DETC2015-46862
From:
  • ASME 2015 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 6: 11th International Conference on Multibody Systems, Nonlinear Dynamics, and Control
  • Boston, Massachusetts, USA, August 2–5, 2015
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-5716-8
  • Copyright © 2015 by ASME

abstract

Nonlinear harmonic vibration analysis of a clamped-clamped micro-beam is studied in this paper. Nonlinear forced vibration of a special kind of micro-actuators is examined for the first time. Galerkin method is employed to derive the equation of motion of the micro-beam with two symmetric potential wells. An electric force composed of DC and AC components is applied to the structure. Multiple Scales method (MSM) is used to solve the nonlinear equation of motion. Primary and secondary resonances are taken into account and steady-state response of the microbeam is obtained. A parametric study is then carried out to investigate the effects of different parameters on the amplitude-frequency curves. Finally, phase plot and Poincare map have been taken into consideration to investigate the influence of the amplitude of the harmonic excitation on stability of the microelectromechanical system.

Copyright © 2015 by ASME

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