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Flexure Design for Eight-Bar Rectilinear Motion Mechanism

[+] Author Affiliations
Yang Liu, J. Michael McCarthy

University of California, Irvine, CA

Paper No. DETC2015-47863, pp. V05AT08A025; 7 pages
doi:10.1115/DETC2015-47863
From:
  • ASME 2015 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 5A: 39th Mechanisms and Robotics Conference
  • Boston, Massachusetts, USA, August 2–5, 2015
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-5712-0
  • Copyright © 2015 by ASME

abstract

This paper replaces the hinged pivots of an eight-bar linkage with flexure joints in order to achieve a flexure-connected linkage system that guides rectilinear movement of its end-effector. The goal is a linkage design that can be reduced in size to provide a suspension for the proof masses of a MEMS gyroscope. The symmetric design of the linkage and its long travel relative to other MEMS suspensions has the potential to provide a number of advantages, such as the reduction of quadrature error. The design presented yields 0.1% deviation over its range of movement. An example also presents the driving linkage of the MEMS gyroscope, which is also designed as flexure connected linkage.

Copyright © 2015 by ASME

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