Full Content is available to subscribers

Subscribe/Learn More  >

Casimir and Van der Waals Effects on Voltage Response of Electrostatically Actuated MEMS/NEMS Plates

[+] Author Affiliations
Dumitru I. Caruntu, Reynaldo Oyervides, Valeria Garcia

University of Texas Pan American, Edinburg, TX

Paper No. DSCC2015-9775, pp. V002T25A001; 5 pages
  • ASME 2015 Dynamic Systems and Control Conference
  • Volume 2: Diagnostics and Detection; Drilling; Dynamics and Control of Wind Energy Systems; Energy Harvesting; Estimation and Identification; Flexible and Smart Structure Control; Fuels Cells/Energy Storage; Human Robot Interaction; HVAC Building Energy Management; Industrial Applications; Intelligent Transportation Systems; Manufacturing; Mechatronics; Modelling and Validation; Motion and Vibration Control Applications
  • Columbus, Ohio, USA, October 28–30, 2015
  • Conference Sponsors: Dynamic Systems and Control Division
  • ISBN: 978-0-7918-5725-0
  • Copyright © 2015 by ASME


This paper deals with electrostatically actuated MEMS plates. The model consists of a flexible MEMS plate above a parallel ground plate. An AC voltage of frequency near natural frequency of the plate provides the electrostatic force that actuates the flexible MEMS plate. This leads to parametric resonance. The effect of Casimir and/or van der Waals forces on the voltage-amplitude response of the plate is investigated.

Copyright © 2015 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In