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RFIC Transformer With 12x Size Reduction and 15x Performance Enhancement by Self-Rolled-Up Membrane Nanotechnology

[+] Author Affiliations
Wen Huang, Moyang Li, Songbin Gong, Xiuling Li

University of Illinois at Urbana-Champaign, Urbana-Champaign, IL

Paper No. IPACK2015-48585, pp. V003T07A002; 4 pages
  • ASME 2015 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems collocated with the ASME 2015 13th International Conference on Nanochannels, Microchannels, and Minichannels
  • Volume 3: Advanced Fabrication and Manufacturing; Emerging Technology Frontiers; Energy, Health and Water- Applications of Nano-, Micro- and Mini-Scale Devices; MEMS and NEMS; Technology Update Talks; Thermal Management Using Micro Channels, Jets, Sprays
  • San Francisco, California, USA, July 6–9, 2015
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 978-0-7918-5690-1
  • Copyright © 2015 by ASME


Two types of on-chip RFIC transformers based on CMOS compatible strain-induced self-rolled-up membrane (S-RuM) nanotechnology, with extremely small footprint, are demonstrated. The rolled-up transformers, with their 3D tubular form factors, dramatically reduce the substrate parasitic effects and push the maximum working frequency into millimeter wave bands with a coupling coefficient, k, as high as 0.92. The 3D stand-up nature also allows the tube transformers to be less susceptible to residue stress in the substrate and thus compatible with flexible platforms for wearable RF applications. The demonstrated samples with a turn ratio, n, of 5.5:1 only occupies 805 μm2 on-chip area (s) which is 12x smaller than that of the best planar transformer with the same turn ratio, and its figure of merit n·k/s, is therefore ∼ 6046/mm2, enhanced by 15x.

Copyright © 2015 by ASME



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