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Knudsen Thermal Force Generation at the Microscale

[+] Author Affiliations
Andrew Strongrich, Alina Alexeenko

Purdue University, West Lafayette, IN

Paper No. IMECE2014-38724, pp. V08BT10A043; 5 pages
doi:10.1115/IMECE2014-38724
From:
  • ASME 2014 International Mechanical Engineering Congress and Exposition
  • Volume 8B: Heat Transfer and Thermal Engineering
  • Montreal, Quebec, Canada, November 14–20, 2014
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-4956-9
  • Copyright © 2014 by ASME

abstract

The paper reports on the experimental studies targeting Knudsen forces on silicon microcantilevers. The devices were fabricated on a Silicon-On-Insulator wafer with one end anchored to the substrate. Measurements were performed through direct external heating of the underlying substrate. Device deflection was quantified using confocal microscopy, showing an increase in force magnitude for decreasing Knudsen number. Measurements were carried out at a constant substrate temperature with Knudsen number being controlled directly via ambient pressure.

Copyright © 2014 by ASME

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