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Simultaneous Resonances of Electrostatically Actuated MEMS Resonators

[+] Author Affiliations
Dumitru I. Caruntu, Christian Reyes

University of Texas Pan American, Edinburg, TX

Paper No. DETC2014-34073, pp. V008T11A023; 7 pages
doi:10.1115/DETC2014-34073
From:
  • ASME 2014 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 8: 26th Conference on Mechanical Vibration and Noise
  • Buffalo, New York, USA, August 17–20, 2014
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-4641-4
  • Copyright © 2014 by ASME

abstract

This paper deals with simultaneous resonance of MEMS cantilever resonator sensors under double electrostatic actuation. The system consists of a MEMS cantilever between two parallel fixed plates. The two frequencies of actuation are one near natural frequency, and the other near half natural frequency. The frequency response of the structure is investigated, and parameter influences reported.

Copyright © 2014 by ASME

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