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Investigation of the Dynamics of a Clamped-Clamped Microbeam Near the Third Mode Using a Partial Electrode

[+] Author Affiliations
Karim M. Masri

State University of New York, Binghamton, NY

Mohammad I. Younis

State University of New York, Binghamton, NYKing Abdullah University of Science and Technology (KAUST), Thuwal, Saudi Arabia

Paper No. DETC2014-34923, pp. V006T10A077; 6 pages
doi:10.1115/DETC2014-34923
From:
  • ASME 2014 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 6: 10th International Conference on Multibody Systems, Nonlinear Dynamics, and Control
  • Buffalo, New York, USA, August 17–20, 2014
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-4639-1
  • Copyright © 2014 by ASME

abstract

We present an investigation of the dynamics of a clamped-clamped microbeam excited electrostatically near its third mode. To maximize the response at the third mode, a partial electrode configuration is utilized. A multi-mode Galerkin method is used to develop a reduced order model (ROM) of the beam. A shooting method to find the periodic motion is utilized to generate frequency response curves. The curves show hardenining behavior and dynamic pull-in. We show that the dynamic amplitude of the partial configuration is higher than that of a full electrode configuration. These results are promising for the use of higher-order modes for mass detection and for ultra sensitive resonant sensors.

Copyright © 2014 by ASME

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