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Multi-Mode Excitation of a Clamped-Clamped Microbeam Resonator

[+] Author Affiliations
Mohammad I. Younis

State University of New York, Binghamton, NYKing Abdullah University of Science and Technology (KAUST), Thuwal, Saudi Arabia

Paper No. DETC2014-34916, pp. V006T10A056; 5 pages
doi:10.1115/DETC2014-34916
From:
  • ASME 2014 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 6: 10th International Conference on Multibody Systems, Nonlinear Dynamics, and Control
  • Buffalo, New York, USA, August 17–20, 2014
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-4639-1
  • Copyright © 2014 by ASME

abstract

We present modeling and simulation of the nonlinear dynamics of a MEMS resonator to two-source excitation. The resonator is composed of a clamped-clamped beam excited by a DC voltage load superimposed to two AC voltage loads of different frequencies. One frequency is chosen to be close to the first natural frequency of the beam and the other close to the third (second symmetric) natural frequency. A multi-mode Galerkin procedure is applied to extract a reduced-order model, which forms the basis of the numerical simulations. Time history response, Poincare’ sections, Fast Fourier Transforms FFT, and bifurcation diagrams are used to reveal the dynamics of the system. The results indicate complex nonlinear phenomena, which include quasi-periodic motion, torus bifurcations, and modulated chaotic attractors.

Copyright © 2014 by ASME

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