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Micro-Robotic Actuation Units Based on Thin-Film Piezoelectric and High-Aspect Ratio Polymer Structures

[+] Author Affiliations
Minchul Shin, Jongsoo Choi, Christopher Kao, Kenn R. Oldham

University of Michigan, Ann Arbor, MI

Ryan Q. Rudy, Jeffrey S. Pulskamp, Ronald G. Polcawich

U.S. Army Research Laboratory, Adelphi, MD

Paper No. DETC2014-35145, pp. V004T09A021; 8 pages
doi:10.1115/DETC2014-35145
From:
  • ASME 2014 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- and Nanosystems
  • Buffalo, New York, USA, August 17–20, 2014
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-4635-3
  • Copyright © 2014 by ASME

abstract

A fabrication procedure is presented for creating microactuation elements that link piezoelectric thin-films with high-aspect ratio parylene microstructures. Resulting actuators permit relatively large rotational motions for low voltage operation, while maintaining large weight-bearing capacity. Actuator fabrication is performed on a silicon wafer though a combination of metal and thin-film lead-zirconate-titanate (PZT) deposition and patterning, parylene refill of high-aspect ratio trenches, and dry release of moving parts from the silicon substrate. Static and dynamic responses of various test structures are measured, to estimate material properties of the integrated PZT-polymer structures, for use in future actuator modeling and optimization.

Copyright © 2014 by ASME

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