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Adjustable Sensitivity MEMS Magnetic Sensor

[+] Author Affiliations
Sangtak Park, Majed S. Al-Ghamdi, Mahmoud Khater, Eihab Abdel-Rahman, Mustafa Yavuz

University of Waterloo, Waterloo, ON, Canada

Paper No. DETC2014-35004, pp. V004T09A016; 5 pages
  • ASME 2014 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- and Nanosystems
  • Buffalo, New York, USA, August 17–20, 2014
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-4635-3
  • Copyright © 2014 by ASME


This paper introduces a novel MEMS magnetic field sensor based on the Lorentz force. It measures torsional vibrations excited via Lorentz force. The sensor sensitivity and dynamic range can be tuned by varying an electrostatic bias. Experimental demonstration shows that the sensor sensitivity can be changed from 0.7 (m/s)/T at 6 V DC bias to 1.4 (m/s)/T at 0 V DC bias.

Copyright © 2014 by ASME



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