0

Full Content is available to subscribers

Subscribe/Learn More  >

Collective Dynamics of Arrays of Micro Cantilevers Interacting Through Fringing Electrostatic Fields

[+] Author Affiliations
Slava Krylov, Stella Lulinsky, Inbar Schneider

Tel Aviv University, Tel Aviv, Israel

Bojan R. Ilic

Cornell University, Ithaca, NY

Paper No. DETC2014-34904, pp. V004T09A009; 10 pages
doi:10.1115/DETC2014-34904
From:
  • ASME 2014 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- and Nanosystems
  • Buffalo, New York, USA, August 17–20, 2014
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-4635-3
  • Copyright © 2014 by ASME

abstract

We investigate the collective nonlinear behavior of an array of micro cantilevers interacting by fringing electrostatic fields and fabricated of silicon on insulator (SOI) wafer. The interaction is due to the mechanical coupling originated in the flexibility of the anchor and of the electrostatic coupling through voltage-dependent electrostatic force. In the framework of the reduced order model based on the Galerkin decomposition the array is considered as an assembly of single degree of freedom oscillators. The mechanical coupling matrix is extracted using the full scale finite element analysis of the array while the electrostatic force is approximated by a fit build using the three-dimensional numerical simulation. We show numerically and experimentally that large amplitude collective vibrations of the array can be achieved using parametric excitation while the dynamic properties of the array can be efficiently tuned by the applied voltage.

Copyright © 2014 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In