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Collective Dynamics of Arrays of Micro Cantilevers Interacting Through Fringing Electrostatic Fields

[+] Author Affiliations
Slava Krylov, Stella Lulinsky, Inbar Schneider

Tel Aviv University, Tel Aviv, Israel

Bojan R. Ilic

Cornell University, Ithaca, NY

Paper No. DETC2014-34904, pp. V004T09A009; 10 pages
  • ASME 2014 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- and Nanosystems
  • Buffalo, New York, USA, August 17–20, 2014
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-4635-3
  • Copyright © 2014 by ASME


We investigate the collective nonlinear behavior of an array of micro cantilevers interacting by fringing electrostatic fields and fabricated of silicon on insulator (SOI) wafer. The interaction is due to the mechanical coupling originated in the flexibility of the anchor and of the electrostatic coupling through voltage-dependent electrostatic force. In the framework of the reduced order model based on the Galerkin decomposition the array is considered as an assembly of single degree of freedom oscillators. The mechanical coupling matrix is extracted using the full scale finite element analysis of the array while the electrostatic force is approximated by a fit build using the three-dimensional numerical simulation. We show numerically and experimentally that large amplitude collective vibrations of the array can be achieved using parametric excitation while the dynamic properties of the array can be efficiently tuned by the applied voltage.

Copyright © 2014 by ASME



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