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Dynamic Trapping in Bi-Stable Electrostatically Actuated Curved Micro Beams

[+] Author Affiliations
Lior Medina, Slava Krylov

Tel Aviv University, Ramat Aviv, Israel

Rivka Gilat

Ariel University, Ariel, Israel

Paper No. DETC2014-34880, pp. V004T09A008; 9 pages
  • ASME 2014 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- and Nanosystems
  • Buffalo, New York, USA, August 17–20, 2014
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-4635-3
  • Copyright © 2014 by ASME


Micro and nano devices incorporating bi-stable structural elements such as micro beams are designed to exploit the fact that the latter possess two stable configurations at the same actuation force. Generally, the transition of a micro beam from one table state to another, namely the snap-through which is essentially dynamic phenomenon, can be initiated by either static or dynamic activations. In this work, results of theoretical and numerical investigations of the transient dynamics of a pre-stressed initially curved double clamped micro beams actuated by a time dependent electrostatic load are presented. We show by means of a reduced order model of a shallow beam, derived using the Galerkin procedure, that the beam may exhibit various types of responses. For certain beam characteristics, the second stable state is inaccessible under a static loading but is attainable only by means of a specially tailored dynamic actuation. This gives way to the possibility of trapping the dynamically bi-stable beam at a stable configuration which is close to the electrode by applying special loading sequences.

Copyright © 2014 by ASME
Topics: Microbeams



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