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Primary Resonance of MEMS/NEMS Circular Plate Biosensors

[+] Author Affiliations
Dumitru I. Caruntu, Reynaldo Oyervides

The University of Texas Pan American, Edinburg, TX

Paper No. DETC2014-35496, pp. V004T09A007; 7 pages
  • ASME 2014 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- and Nanosystems
  • Buffalo, New York, USA, August 17–20, 2014
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-4635-3
  • Copyright © 2014 by ASME


This investigation deals with M/NEMS circular plates under electrostatic actuation. Such structures can be used as resonator sensors for medicine and biology applications such as virus, bacteria or DNA detection. The system consists of a clamped circular plate over a ground. The actuation of the plate is done through an AC voltage whose frequency is near half natural frequency of the plate. This produces a primary resonance to be used afterwards for sensing purposes. It is showed that a saddle-node bifurcation occurs. The effects of damping, voltage, Casimir, and van der Waals forces are predicted.

Copyright © 2014 by ASME



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