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Incremental Geometric Modeling and Mask Synthesis for Surface Micromachined MEMS

[+] Author Affiliations
Jianhua Li, Hao Ling

East China University of Science and Technology, Shanghai, China

Zhengchun Du

Shanghai Jiao Tong University, Shanghai, China

Paper No. DETC2014-35558, pp. V01AT02A069; 9 pages
  • ASME 2014 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 1A: 34th Computers and Information in Engineering Conference
  • Buffalo, New York, USA, August 17–20, 2014
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-4628-5
  • Copyright © 2014 by ASME


In the design of surface micromachined microelectromechanical systems (MEMS), there is a lack of effective modeling methods to refine the geometry of a MEMS device. This paper presents a method of incremental geometric modeling and mask synthesis for surface micromachined MEMS. In this method, propagation-mapping graphs are introduced to label all the affected entities in one variation operation, according to the characteristic of surface micromachining. Based on the propagation-mapping graphs constructed from a 3D geometric model and its process model, variation propagation and mapping are used to update these models. In order to keep manufacturability of these models, four manufacturability problems caused by variation propagation are analyzed and a manufacturability maintenance method is discussed. Variation propagation and mapping achieve incremental modeling for the geometric model and process model of a MEMS device. This method enables designers to modify a MEMS device in a quick and intuitive way. Finally the method is implemented and some test results are given.

Copyright © 2014 by ASME



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