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Primary Resonance Voltage Response of Electrostatically Actuated M/NEMS Circular Plate Resonators

[+] Author Affiliations
Dumitru I. Caruntu, Reynaldo Oyervides

The University of Texas Pan American, Edinburg, Texas

Paper No. DSCC2014-6277, pp. V003T50A004; 6 pages
  • ASME 2014 Dynamic Systems and Control Conference
  • Volume 3: Industrial Applications; Modeling for Oil and Gas, Control and Validation, Estimation, and Control of Automotive Systems; Multi-Agent and Networked Systems; Control System Design; Physical Human-Robot Interaction; Rehabilitation Robotics; Sensing and Actuation for Control; Biomedical Systems; Time Delay Systems and Stability; Unmanned Ground and Surface Robotics; Vehicle Motion Controls; Vibration Analysis and Isolation; Vibration and Control for Energy Harvesting; Wind Energy
  • San Antonio, Texas, USA, October 22–24, 2014
  • Conference Sponsors: Dynamic Systems and Control Division
  • ISBN: 978-0-7918-4620-9
  • Copyright © 2014 by ASME


This paper investigates the voltage-amplitude response of soft AC electrostatically actuated M/NEMS clamped circular plates. AC frequency is near half natural frequency of the plate. This results in primary resonance. The system is analytically modeled using the Method of Multiple Scales (MMS). The system is assumed weakly nonlinear. The behavior of the system including pull-in instability as the AC voltage is swept up and down while the excitation frequency is constant is reported. The effects of detuning frequency, damping, Casimir force, and van der Waals force are reported as well.

Copyright © 2014 by ASME



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