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Fabrication of Continuously Varying Thickness Micro-Cantilever Using Bulk Lithography Process

[+] Author Affiliations
Kiran Bhole, Sunil Ekshinge, Prasanna Gandhi

Indian Institute of Technology Bombay, Mumbai, MH, India

Paper No. MSEC2014-4041, pp. V001T01A009; 7 pages
doi:10.1115/MSEC2014-4041
From:
  • ASME 2014 International Manufacturing Science and Engineering Conference collocated with the JSME 2014 International Conference on Materials and Processing and the 42nd North American Manufacturing Research Conference
  • Volume 1: Materials; Micro and Nano Technologies; Properties, Applications and Systems; Sustainable Manufacturing
  • Detroit, Michigan, USA, June 9–13, 2014
  • Conference Sponsors: Manufacturing Engineering Division
  • ISBN: 978-0-7918-4580-6
  • Copyright © 2014 by ASME

abstract

This paper presents fabrication of varying thickness polymer micro-cantilever using recently developed and characterized, single scan, three-dimensional (3D) micro-fabrication process termed as “bulk lithography”. The process allows fabrication of 3D microstructures that demonstrate continuous variation in the thickness direction as against the discrete variation provided by the normal microstereolithography (layer-by-layer) and other VLSI processes. The required depth variation is obtained during fabrication by allowing unconstrained depth photopolymerization and varying laser exposure while scanning. Towards goal to achieve the control over cured depth and smooth free surface (down facing surface), the process is characterized for cured depth and width under wide range of energy dose at different exposure duration. The depth characterization, represented earlier in a form of an empirical model, is used programmatically to impose any desired spatial intensity variation during scan. Additional width characterization, presented in this paper, is used to optimize the line spacing for achieving smooth unconstrained surface. Specific case of fabrication of tapered micro-cantilever is demonstrated with the proposed technique.

Copyright © 2014 by ASME

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