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An Analytical Model of Micromachined Electromagnetic Inductive Contactless Suspension

[+] Author Affiliations
Kirill V. Poletkin, Ulrike Wallrabe

University of Freiburg, Freiburg, Germany

Alexsandr I. Chernomorsky

Moscow Aviation Institute, Moscow, Russia

Christopher Shearwood

Nanyang Technological University, Singapore

Paper No. IMECE2013-66010, pp. V010T11A072; 7 pages
doi:10.1115/IMECE2013-66010
From:
  • ASME 2013 International Mechanical Engineering Congress and Exposition
  • Volume 10: Micro- and Nano-Systems Engineering and Packaging
  • San Diego, California, USA, November 15–21, 2013
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-5639-0
  • Copyright © 2013 by ASME

abstract

The paper presents an analytical model of a micromachined electromagnetic inductive contactless suspension, which describes the dynamics of a levitated disk shaped proof mass in space, near an equilibrium point. The proof mass is levitated in an electromagnetic field created by a ring shaped coil. The model derives from the analysis of the set of Lagrange-Maxwell equations obtained for the proof mass-coil system in a general form. Also the condition for the stable levitation of the proof mass in space is developed and expressed in terms of coefficients of the quadratic form of a function of mutual inductance between the disk shaped proof mass and ring shaped coil.

Copyright © 2013 by ASME
Topics: Micromachining

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