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Characterization of Micromachined Seesaw Type Microphone

[+] Author Affiliations
Byungki Kim

Korea University of Technology and Education, Cheonan, Chungnam, Korea

Paul Phamduy

Polytechnic Institute of New York University, Brooklyn, NY

Paper No. IMECE2013-64974, pp. V010T11A068; 2 pages
  • ASME 2013 International Mechanical Engineering Congress and Exposition
  • Volume 10: Micro- and Nano-Systems Engineering and Packaging
  • San Diego, California, USA, November 15–21, 2013
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-5639-0
  • Copyright © 2013 by ASME


A seesaw type microphone is characterized to study its feasibility for sound source localization. The microphone is composed of a flexible rectangular diaphragm sustained by two torsion-bars. With this structure, the microphone has two main dynamic modes: rocking mode from the twisting of the torsion bars and bending mode from the bending of the flexible diaphragm. Thus, the microphone’s motion is a combination of the two modes. Depending on the frequency of the incident sound and its arrival time difference at each side of the seesaw type microphone, relative motion of both sides of the seesaw type microphone is changed. By measuring relative amplitude and phase of the motion at each side of the microphone, arrival time difference of the sound source at each side can be estimated, and then, localization of the sound source is feasible. In this paper, we present that the microphone shows a significant vibration difference from each side when AC with 45° phase difference is applied to each side of the microphone to mimic the microphone receiving angled incoming sound.

Copyright © 2013 by ASME



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